有码中文字幕在线播放-人妻一区二区三区久久夜夜-亚洲欧美日韩综合一区二区-国产精品久久久久久不卡性色

Application
application area

Electronic information semiconductor graphite

時(shí)間:2022-07-28瀏覽次數(shù):4334
app_2.jpg

Graphite deposited silicon carbide base is a component used to support wafers in the process of depositing semiconductor thin film materials on the surface of wafers. It is mainly used in metal organic chemical vapor deposition (MOCVD) equipment. The base material of the product is high-purity graphite, and there is a layer on the surface with a thickness of about 110 μ m±15 μ M U.M thick dense silicon carbide film, which is obtained by chemical vapor phase deposition (CVD) process. Its function is to avoid the pollution of the wafer caused by the outgassing of the graphite matrix under high temperature conditions, and improve the thermal shock resistance, oxidation resistance, mechanical strength and chemical gas corrosion resistance of the graphite matrix. In this study, a kind of high density and high purity graphite is used as the matrix, and its thermal expansion coefficient is close to silicon carbide; Using methyl trichlorosilane (ch3si CL3, abbreviated as MTS) as the gas source and H2 as the carrier gas, a high-purity, dense, uniform and defect free silicon carbide film was formed on the surface of graphite substrate under certain process parameters such as furnace pressure and temperature. The microstructure, chemical composition and film quality of the film were observed, analyzed and evaluated.


It is applied to semiconductor, integrated circuit, flat film display, LED chip, photovoltaic solar energy, optical optical communication, optical magnetic storage, electronic packaging, electric new energy, Low-E glass, decorative coating, tool coating and other fields.

亚洲黄色av网址在线观看| 人妻av在线中文字幕| 国产欧美高清在线观看视频| 中出亚洲精品日韩在线视频| 国产精品青青在线观看爽香蕉| 久久久久久精品国产毛片| av网址不卡在线免费观看| 亚洲av成人一区二区三区| 在线日韩中文字幕二区| 精品一区无遮挡免费网站| 日韩有码一区在线观看| 日本欧美自拍偷拍高清| 五月婷婷六月丁香在线观看| 日本韩国三级视频在线观看| 强乱人妻中文字幕日本| 欧美精品一区影片在线观看| 丰满人妻一区二区三区免费| 免费国产三级在线观看| 欧美日韩一区二区三区四区高清视频| 91欧美日韩精品在线| 日韩三级av在线免费观看| 欧美黄片视频免费观看| 久久国产精品午夜亚洲欧美| 欧美 国产 综合 日韩| 国产精品岛国片在线观看| 日韩欧美国产精品一区二区| 蜜桃在线视频在线观看| 亚洲日本av一区二区| 国产粉嫩美女一区二区三| 日韩欧美啪啪一区二区| 午夜丁香婷婷爽少妇av| 欧美日韩亚洲人人夜夜澡| 欧美日韩一区二区综合在线视频| 国产无遮挡的免费视频| 五月综合丁香婷婷久久| 男人的天堂av最新版本| 人妻操人人妻中出av| 剧情av一区二区在线| 国产日韩精品在线视频| 91看看午夜福利视频| 中文有码人妻字幕在线|